Ultra-precision optical testing approaches and equipment development, Advanced optical manufacturing process and control algorithm.
(1) Differential asymmetric interferometrical techniques and its application: Some novel ultra-precision optical phase difference measurement schemes were presented, by which the modules were developed and demonstrated for geometric measurement and acoustic sensing applications;
(2) Large aperture diffraction optics fabrication and its application: A large-scale light-weight diffraction optics with low WFE was fabricated, and also some diffractive imaging systems were demonstrated.